Soft X ray/EUV light source

Soft x rays for 3-D x-ray tomographic microscopy can be generated using gas-puff z pinches

Line radiation in the range of 40-15 Å (310-830 eV) with a total energy of 10 J using CO2 is expected.
Soft x rays (~520eV) from synchrotron radiation at Advanced Light Source (ALS) is used for 3-D x-ray tomographic microscopy.
Building an x-ray laser with wavelength of 41.8 / 32.8 nm is possible if Xenon or Krypton is used.
Ref.

P. Choi et al. Rev. Sci. Instru. 57, 2162 (1986)

G.  Nave et al. J. Appl. Phys. 65, 3385 (1989)

M. Uchida et al. Proc. National Acad. Sci. 106, 19375 (2009)